Shielded capacitive mask aligner

ABSTRACT

An aligner for aligning a mask and a wafer during photolithography of a semiconductor chip uses detection of the differential capacitance between two sets of conductive fingers on the mask and ridges on the wafer. An A.C. signal is applied to the ridges and the phase or amplitude of the signals coupled to the two sets of fingers is detected and compared. A shield is positioned between the ridges and the fingers to ensure that coupling occurs only between desired portions of the ridges and the fingers.

BACKGROUND AND SUMMARY OF THE INVENTION

During the processing of an electronic chip a semiconductor wafer isexposed to a radiation source in order to develop a photoresist layer ontop of the wafer. A mask is used between the source and the wafer toselectively block the radiation and, thereby, to develop a desireddesign in the photoresist which controls subsequent etching of the chip.At various processing stages different masks may be used to developdifferent desired designs on the wafer. It is essential that the variousmasks be correctly aligned with the wafer so that tight tolerances,allowing, for example, the fabrication of sub-micron width lines, may bemaintained.

Optical aligners have been used in the prior art to manually alignwafers and masks. Prior art optical aligners have been slow and subjectto operator error because of the need to visually align reference markslying in different planes. Other techniques using Fresnel lenses ordiffraction gratings have been proposed but have proved to be adverselysensitive to reference mark variations and have not allowed dynamiccontrol during wafer exposure.

In accordance with the illustrated preferred embodiment of the presentinvention, alignment is accomplished by detecting a differentialcapacitance between ridges located on the wafer and sets ofinterdigitated fingers located on the mask. An electrical signal appliedto the wafer is capacitively coupled from the wafer ridges to theoverlying mask fingers. The wafer and the mask are aligned when thecoupled signals observed on each set of interdigitated fingers are equalin amplitude. Since signal coupling occurs between numerous fingers andridges, errors due to variations in the fabrication of individualfingers or ridges are averaged if the finger and ridge repetitionpatterns (constant, chirped or random) are kept substantially identical.Further, rotational or orthogonal alignment may be achieved with the useof multiple finger/ridge sets and alignment may be automated by usingthe measured signals to control positioning equipment.

In accordance with another preferred embodiment of the presentinvention, conductive shields are placed between the wafer andinterconnecting side lines of the fingers. The shields ensure thatcoupling only occurs between the ridges and the fingers and not betweenthe ridges and the side lines so that lateral movement of the wafer doesnot cause variations in the differential capacitance to occur. Thisallows independent single-dimension alignments to be made.

In accordance with an additional preferred embodiment of the presentinvention, two sets of fingers are driven by a single driving signal. Aphase shifter shifts the driving signal applied to one finger set sothat the signal on the finger set is 180 degrees out of phase with thesignal on the other finger set. A voltmeter detects a coupled signal onthe wafer and a null is observed when alignment is achieved.

In accordance with a further preferred embodiment of the presentinvention, alignment is achieved with the wafer grounded. A singledriving signal is applied to two finger sets through a transformer and adiode bridge and is coupled to ground through the wafer. A recharge pathis provided through conductive shields overlaying the finger sets.Alignment is achieved when a D.C. current null is observed.

In accordance with still another preferred embodiment of the presentinvention, alignment is performed on a mask and a wafer which areseparated by a substantial distance as required in some opticallithography or metrology applications. In these applications thedistance between the mask and the wafer is too great for meaningfulcapacitive coupling to occur between the mask and the wafer. Two groupsof references, one for the mask and the other for the wafer, areattached to a backbone frame and are initially aligned together. Themask is aligned to one reference and the wafer is aligned to the otherreference by measurement of the differential capacitances involved.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a side view of a wafer and mask which are aligned inaccordance with the preferred embodiment of the present invention.

FIG. 2 is a detailed view of the wafer array which is used on the wafershown in FIG. 1.

FIGS. 3A-B provide detailed views of the interdigitated fingers whichare located on the mask shown in FIG. 1.

FIGS. 4A-B are exploded side views of the mask and wafer shown in FIG.1.

FIG. 5 is a perspective view of the preferred embodiment of the presentinvention.

FIG. 6 is a schematic diagram of the detector shown in FIG. 5.

FIG. 7 is a perspective view of another preferred embodiment of thepresent invention in which the mask is driven with a signal.

FIG. 8 is a schematic diagram of another preferred embodiment of thepresent invention in which the wafer is grounded.

FIG. 9 shows a rotational aligner which uses four aligners which areconstructed in accordance with the preferred embodiment of the presentinvention shown in FIG. 5.

FIG. 10 is a side view of another preferred embodiment of the presentinvention in which the mask and the wafer are separated by a substantialdistance.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENT

FIG. 1 shows a mask 1 aligned with a wafer 3 (mounted on a chuck 5) sothat the wafer 3 is irradiated by a source 7 and a desired design isdeveloped on a photoresist coating of wafer 3. Source 7 may generate,for example, visible light or X-rays. Alignment is accomplished bymeasuring a differential capacitance between a finger region 9 and awafer array 11.

FIG. 2 shows a perspective view of a portion of array 11 on wafer 3.Array 11 comprises a series of ridges 13 and valleys 15 which are formedby etching wafer 3. Ridges 13 have a predetermined repetition patternwhich may be constant (as shown in FIG. 2) or random or chirped (asshown in FIG. 4B). The wafer 3 is lightly doped so as to have aresistivity on the order of one ohm-centimeter and the ridges 13 andvalleys 15 may be coated with a dielectric or conductive layer asrequired for other processing of the wafer 3 without affecting theperformance of the preferred embodiment of the present invention. Ifwafer 3 comprises silicon having a [100] orientation, then etching ofpattern 11 may be performed with KOH. If other silicon orientations orother materials are used for wafer 3, then fabrication of the ridges 13and valleys 15 may be performed using any of a number of well knownorientation dependent etchants. If a GaAs wafer 3 is used, ridges 13 maycomprise conductive traces which are deposited upon the insulating GaAswafer 3. Valleys 15 then comprise the insulating GaAs and air gapsbetween individual conductive traces.

FIG. 3A shows a detailed view of hand 21 (including side line 31 andfingers 23) and hand 25 (including side line 35 and fingers 27) offinger region 9. Hands 21 and 25 are fabricated as conductive lineswhich may be printed or deposited upon mask 1. Side lines 31 and 35 ofhands 21 and 25 may extend to the edge of mask 1 to allow for externalconnections. Fingers 23 and fingers 27 are interdigitated and therepetition patterns of fingers 23, fingers 27 and ridges 13 aresubstantially identical. The effect of specific locational errors ofindividual fingers is minimized by the averaging effect over the totalnumber of fingers.

FIG. 3B shows a detailed view of finger region 9 including groundedshields 37, 39. Typically, mask 1 comprises a 3 micron thick boronnitride substrate having a polyimide coating. The hands 21, 25 comprisea gold layer deposited on the polyimide. In order to ensure thatcapacitive coupling occurs only between ridges 13 and fingers 23, 27(and not between ridges 13 and side lines 31, 35) grounded shields 37,39 overlay all side lines 31, 35. Thus, grounded shields 37, 39 areinterposed between side lines 31, 35 and wafer 3 to eliminate capacitivecoupling between side lines 31, 35 and any portion of wafer 3. Shields37, 39 may be fabricated by depositing an insulating photoresist layerover hands 21, 25 and then depositing shields 37, 39 as a one micronthick conductive layer (e.g., aluminum) which is then grounded.

FIG. 4A shows an exploded side view of a portion of mask 1 and wafer 3.The repetition patterns of fingers 23, 27 and ridges 13 are constant andsubstantially identical. Mask 1 and wafer 3 are in sufficiently closeproximity, as is typical in X-ray photolithography, for example, thatmeaningful capacitive coupling between ridges 13 and fingers 23, 27occurs. A block 29 may be used to cover finger region 9 on mask 3 sothat inadvertent processing of array 11 on wafer 3 does not occur duringirradiation of wafer 3. Block 29 may comprise a material which absorbsthe radiation generated by source 7.

FIG. 4B shows an exploded side view of a portion of mask 1 and wafer 3in which the repetition patterns of the ridges 13 and fingers 23, 27 arechirped in spatial frequency. If the repetition patterns of fingers 23,27 and ridges 13 are substantially identical and aperiodic there will beone unique position at which the ridges 13 are centered between pairs offingers 23, 27. This permits determination of a single unique alignment.It should be noted that a unique alignment may also be obtained by usingidentical repetition patterns which are random.

FIG. 5 shows a perspective view of the preferred embodiment of thepresent invention including finger region 9 and array 11 shown in FIGS.1-4. For the sake of illustrative clarity, mask 1 itself and theremainder of wafer 3 outside of array 11 are not shown in FIG. 5. Anoscillator 41 is connected to one side of wafer 3 and an opposite sideis grounded. Oscillator 41 impresses a sine wave or other signal acrossarray 11. Side lines 31, 35 of hands 21, 25 are connected to a detector43 which compares the air coupled capacitance of ridges 13 to fingers 23and the air coupled capacitance of ridges 13 to fingers 27. Detector 43may, for example, measure a relative signal amplitude or a relativesignal phase.

FIG. 6 is a schematic diagram of the detector 43 shown in FIG. 5 whichis operative for measuring a relative signal amplitude. Capacitors 53and 57 represent the capacitive coupling between ridges 13 and fingers23 and 27, respectively. Bridge 51, comprising matched Schottky barrierdiodes, rectifies the signals coupled by capacitors 53, 57 and appliesthem to amplifier 55 which utilizes a feedback resistor (R) 59. Theoutput of detector 43 is proportional to the difference in capacitanceof capacitors 53 and 57 and the output (Vo) is zero when the twocapacitances are equal.

An aligner incorporating the preferred embodiment of the presentinvention shown in FIGS. 1-6 has been used in conjunction with X-raylithography to allow fabrication of one micron wide lines on a siliconwafer. [100] orientation silicon was used and KOH was utilized as theorientation dependent etchant to create ridges 13 and valleys 15 onwafer 3. The gap between mask 1 and wafer 3 was 30 microns. Array 11 onwafer 3 was 3 by 3 millimeters in size although the size and location ofarray 11 may be varied as dictated by the particular geometry of thewafer being fabricated. The valleys 15 were approximately 80 micronsdeep, the tops of ridges 13 were 40 microns wide and the repetitionpattern had a constant period of 150 microns. The fingers 23, 27 were 60microns wide and the constant period of the repetition pattern yielded a15 micron spacing between adjacent fingers. The sine wave output ofoscillator 41 was 100 volts peak-to-peak at 500 KHz.

Using the above-described X-ray lithography aligner, it was found that a0.07 micron misalignment of mask 1 and wafer 3 created a measurablecapacitance differential of approximately 0.28 femtofarad. Therelationship between misalignment and capacitance differential waslinear since capacitance is inversely proportional to distance. In FIG.5, the output of detector 43 was zero when each of ridges 13 wascentered between a finger 23 and a finger 27. When centering occured thedistances between each of ridges 13 and the nearest fingers 23, 27 wereequal and, hence, the capacitances were equal. Since multiple fingers oneach of hands 21, 25 were used, individual errors were averaged. Whenrelative movement of mask 1 and wafer 3 occured, as shown by the arrowin FIG. 5, one capacitance increased while the other decreased and theoutput of detector 43 deviated from zero. It should be noted thatshields 37, 39 shown in FIG. 3B ensured that relative movement in adirection orthogonal to the arrow shown in FIG. 5 did not produce achange in the differential capacitances or a deviation in the output ofdetector 43. For optimal alignment sensitivity it was found that theperiod of the repetition pattern should be roughly 5 to 6 times the sizeof the gap.

FIG. 7 shows an aligner which is constructed in accordance with anotherpreferred embodiment of the present invention with which alignment maybe performed without applying a high voltage to wafer 3. An oscillator101 provides a sine wave signal to side line 31 and to a non-attenuatingphase shifter 103. The phase shifter 103 provides a sine wave signal toside line 35 which is of the same amplitude and frequency as the signalapplied to side line 31 but which is phase shifted by 180 degrees. Inorder that the two signals have identical amplitudes and oppositephases, a Blumlein transformer may be used in place of the phase shifter103. The Blumlein transformer, which is well known to persons ofordinary skill in the art, provides two outputs having identicalamplitudes and opposite phases. The two outputs may be coupled to sidelines 31 and 35, respectively. A voltmeter 105 detects a summation ofthe two signals which are coupled to wafer 3. When alignment is achievedthe shifted and unshifted signals are coupled equally to wafer 3, thetwo signals cancel and a null is detected by voltmeter 105. Time orfrequency multiplexing may be used if more than one aligner is utilizedon a single wafer 3.

FIG. 8 shows an aligner which is constructed in accordance with anotherpreferred embodiment of the present invention with which alignment maybe performed with wafer 3 grounded. A transformer 113 having matchedwindings provides a sine wave from driver 111 to fingers 23, 27 and toshields 37, 39 (shown in FIG. 3B) at the same amplitude. The alignershown in FIG. 8 may be viewed as having an air gap capacitor (C1)between ridges 13 and fingers 27, and another air gap capacitor (C2)between ridges 13 and fingers 23. Charge is delivered to capacitor C1from storage capacitor 131 during the positive portions of the sine waveand is returned to storage capacitor 131 from capacitor C2 during thenegative portions. Any difference in capacitance between capacitors C1and C2 (caused by misalignment) causes a net D.C. voltage across storagecapacitor 131 which is detected by amplifier 123 and voltmeter 125. Anull occurs when alignment is achieved.

FIG. 9 shows a rotational aligner which is constructed in accordancewith another preferred embodiment of the present invention. Since thealigner shown in FIG. 5 does not provide alignment sensitivity in adirection which is orthogonal to the arrow depicted in FIG. 5 it isnecessary to use two mutually orthogonal sets of ridges and fingers toprovide simultaneous alignment in both an "x" and a "y" direction.Further, if four sets of ridge/fingers 81, 83, 85, 87 are used as shownin FIG. 9, rotational misalignment of 10 to 20 microradians can bedetected and corrected. For the sake of illustrative clarity, onlytwelve ridges 89 and twenty-four fingers 91, 93 are shown while inreality the number will be dependent upon the space available and ridges89 and fingers 91, 93 will be similar to ridges 13 and fingers 23, 27shown in FIGS. 2-5. Shields as discussed above with reference to FIG. 3Bshould be used to avoid misalignment caused by unwanted capacitivecoupling.

FIG. 10 shows another preferred embodiment of the present invention inwhich a mask 1 and a wafer 3 are spaced a substantial distance apart asis required by various optical lithography methods. Thus, thecapacitance between mask 1 and wafer 3 can not easily be measured.Instead, a rigid backbone 71 is equipped with two upper reference ledges61, 63 and two lower reference ledges 65, 67 which are initially alignedtogether to provide a benchmark. Ledges 61, 63 include conductive ridges73 which perform the same functions as do ridges 13 in FIG. 2. Thus,mask 1 can easily be aligned to ledges 61, 63 in the manner discussedabove with reference to FIGS. 1-6 by driving ridges 73 with oscillator41 and connecting detector 43 to finger region 9. In a like manner,ledges 65, 67 include fingers 75 and mask 3 can be aligned to ledges 65,67 by driving wafer 3 with oscillator 41 and connecting detector 43 tofingers 75. Thus, alignment can be achieved without requiring that mask1 be in close proximity with wafer 3.

We claim:
 1. An aligner for aligning a primary element with a secondaryelement across a gap, the aligner comprising:an array of substantiallyparallel ridges located on the primary element; a first hand located onthe secondary element, said first hand comprising a plurality ofsubstantially parallel conductive fingers capacitively coupled to thearray; a second hand located on the secondary element, said second handcomprising a plurality of substantially parallel conductive fingersinterdigitated with the fingers of the first hand and capacitivelycoupled to the array; a first side line located on the secondary elementand interconnecting the fingers of the first hand; a second side linelocated on the secondary element and interconnecting the fingers of thesecond hand; first and second insulating layers covering the first andsecond side lines; first and second conductive shields covering thefirst and second insulating layers; an oscillator, connected across thearray, for driving the array with an electrical signal; and a detector,connected to the first and second hands, the detector being operativefor measuring a first component of the signal at the first hand and formeasuring a second component of the signal at the second hand.
 2. Analigner as in claim 1, wherein the first and second conductive shieldsare grounded.
 3. An aligner as in claim 2, wherein the primary elementcomprises a semiconductor wafer and the secondary element comprises amask.
 4. An aligner as in claim 3, wherein the signal is sinusoidal. 5.An aligner as in claim 3, wherein the detector is further operative forpresenting a null indication when the first and second signal componentsare equal in amplitude.
 6. An aligner as in claim 3, wherein thedetector is further operative for presenting a null indication when thefirst and second signal components are equal in phase.
 7. An aligner foraligning a primary element with a secondary element across a gap, thealigner comprising:an array of substantially parallel ridges located onthe primary element; a first hand located on the secondary element, saidfirst hand comprising a plurality of substantially parallel conductivefingers capacitively coupled to the array; a second hand located on thesecondary element, said second hand comprising a plurality ofsubstantially parallel conductive fingers interdigitated with thefingers of the first hand and capacitively coupled to the array; a firstside line located on the secondary element and interconnecting thefingers of the first hand; a second side line located on the secondaryelement and interconnecting the fingers of the second hand; first andsecond insulating layers covering the first and second side lines,respectively; first and second conductive shields covering the first andsecond insulating layers, respectively; and circuit means for sensing afirst capacitance between the first hand fingers and the array and forsensing a second capacitance between the second hand fingers and thearray, the relative values thereof providing an indication of thealignment between the primary element and the secondary element.
 8. Analigner as defined in claim 7 wherein said primary element comprises asubstrate and said array comprises a plurality of substantially parallelridges which are an integral part of the substrate such that electricalconnection can be made to the ridges by a single connection to thesubstrate.
 9. An aligner as defined in claim 8 wherein said firstinsulating layer and said first conductive shield cover a portion of thesecond hand fingers, and said second insulating layer and said secondconductive shield cover a portion of the first hand fingers. 10.Apparatus for aligning a noninsulating substrate with a mask across agap comprising:a first hand located on the mask comprising a pluralityof substantially parallel conductive fingers disposed in a firstrepetition pattern; a second hand located on the mask comprising aplurality of substantially parallel conductive fingers disposed in asecond repetition pattern, said second hand fingers being interdigitatedwith said first hand fingers, said first hand and said second hand inoperation being positioned in proximity to an array of substantiallyparallel ridges on the substrate such that said first and said secondhands each have a finger capacitively coupled to each ridge of thearray; a first side line located on the mask and interconnecting thefingers of the first hand; a second side line located on the mask andinterconnecting the fingers of the second hand; first and secondinsulating layers covering the first and second side lines,respectively; first and second conductive shields covering the first andsecond insulating layers, respectively; and circuit means which inoperation senses a first capacitance between said first hand fingers andsaid array ridges and a second capacitance between said second handfingers and said array ridges, the relative values of said firstcapacitance and said second capacitance providing an indication of thealignment of the substrate and the mask.